A model-based methodology for the analysis and design of atomic layer deposition processes-Part I: Mechanistic modelling of continuous flow reactors
This paper presents the development of an experimentally validated model that mechanistically comprehends the complex interaction between the gas-phase fluid dynamics, the mass transport of individual species, and the heterogeneous gas-surface reaction mechanism in a continuous cross-flow atomic layer deposition (ALD) reactor. The developed ALD gas-surface reaction mechanism, purely based on conse