Defect engineering in Czochralski silicon by electron irradiation at different temperatures
Infrared absorption studies of defect formation in Czochralski silicon irradiated with fast electrons in a wide range of temperatures (80-900 K) have been performed. The samples with different contents of oxygen (O-16, O-18) and carbon (C-12, C-13) isotopes were investigated, The main defect reactions are found to depend strongly on irradiation temperature and dose, as well as on impurity content