Near Ambient Pressure X-ray Photoelectron Spectroscopy Study of the Atomic Layer Deposition of TiO2 on RuO2(110)
The atomic layer deposition (ALD) of TiO2 on a RuO2(110) surface from tetrakis(dimethylamido) titanium and water at 110 degrees C was investigated using near ambient pressure X-ray photoelectron spectroscopy (NAP-XPS) at precursor pressures up to 0.1 mbar. In addition to the expected cyclic surface species, evidence for side reactions was found. Dimethylamine adsorbs on the surface during the TDMA
