Plasma Processing Workshop at Lund Nano Lab
Published 4 December 2017 On November 15-16, 2017 Lund Nano Lab (LNL) hosted a second joint LNL-Plasma-Therm Plasma Processing workshop. The Workshop focused on the fundamentals of plasma reactors, mechanisms of etching and deposition as applied to nanofabrication and covered state-of-the-art etching and deposition techniques. Dr. David Lishan (Plasma-Therm, USA) gave an overview of the modern pla
https://www.nano.lu.se/article/plasma-processing-workshop-lund-nano-lab - 2025-04-25