Antireflection Patterning of Si for InAsSb Nanowire Infrared Photodetectors
The pattering of an optical surface with physical features like with very low reflectivity and high transmission of IR or visible light can be used e.g. for antireflective windows for solar cells and photodetectors. Here we present results on antireflective patterning of Si for back side illuminated InAsSb nanowire long wavelength IR (8-15 µm) photodetectors. Photolithography and dry etching techn