Microbiosensor based on an integrated thermopile
A microbiosensor based on an integrated thermopile was designed and fabricated on a quartz chip. The thermopile, which was manufactured by doping boron in polysilicon together with aluminium, provided a potential output of ca. 2 mV K. A silicone rubber membrane was used to form and seal the microchannel. The total column volume was 20 μl. Glucose oxidase and catalase were co-immobilized on spheric
