Carbon nanotube membranes for EUV photolithography-a versatile material platform
Next generation of high-NA extreme ultraviolet (EUV) photolithography introduces higher power levels and faster reticle accelerations, enabling breakthrough in scanner efficiency. This results in higher temperatures and mechanical stresses on the EUV pellicles. Here we demonstrate scalable carbon nanotube (CNT) membrane mass production from a floating catalyst chemical vapor deposition (FC-CVD) re