Electron-beam-induced luminescence studies of low-dimensional semiconductor structures
Cathodoluminescence (CL) in the scanning electron microscope (SEM) or the scanning transmission electron microscope (STEM) is a very useful tool for the characterization of low-dimensional semiconductor structures. To obtain spatial resolution, the SEM/STEM provides a highly focused electron beam that can be positioned at specific sites to obtain spot mode spectra. The beam can also be scanned ove