Development of a thermal micro-biosensor fabricated on a silicon chip
In order to develop a sensitive, versatile and inexpensive portable instrument, a calorimetric micro-biosensor was designed and fabricated by etching part of the flow system into a silicon wafer. The utility of the device was tested using the enzymes, catalase and penicillinase. This sensor showed good reproducibility and linearity up to 100 mM. The system also showed higher sensitivity than the c