A model-based methodology for the analysis and design of atomic layer deposition processes-Part II: Experimental validation and mechanistic analysis
This paper demonstrates the experimental validation and mechanistic analysis of the continuous cross-flow atomic layer deposition (ALD) reactor model developed in the first article of this series (Holmqvist et al., in press). A general nonlinear parameter estimation problem was formulated to identify the kinetic parameters involved in the developed ALD gassurface reaction mechanism, governing ZnO
