Determination of interstitial oxygen concentration in germanium by infrared absorption
The intensities of infrared absorption due to the asymmetric stretching vibrations of interstitial oxygen atoms in Ge crystals enriched with O-16 and O-18 isotopes have been compared with oxygen concentrations determined by means of secondary ion mass spectrometry. For Ge samples with oxygen content less than 5 x 10(17) cm(-3), a good correlation has been found between the values of oxygen concent