Device development for doping evaluation in nanowires using capacitance-voltage measurements
This thesis aims to show the prospect of capacitance measurements over nanowire arrays as an evaluation method of the p-doping level in weakly p-doped p-n nanowires. The premise of the method is that there will be a high yield of statistical data regarding the doping level of the nanowires. The majority of the work carried out and presented in this thesis is however aimed at the manufacturing of a
