Evaluation of atomic layer etching possibility at Lund Nano Lab
In modern electronics, device downscaling demands atomic precision control and Atomic Layer Etching (ALE) can provide this prime capability with minute device damage. ALE, also known as layer-by-layer etching, is a technique of removing atomically thin layers from the surface of materials in a controlled way.This technique is now very crucial for nanofabrication and semiconductor industry in order