Development of a microfabricated electrochemical-cantilever hybrid platform
The design and fabrication of a combined electrochemical-cantilever microfluidic system is described. A chip integrating cantilevers with electrodes into a microchannel is presented with the accompanying polymer flow cell. Issues such as electrical and fluid connections are addressed, electromechanical behavior in ionic solution is investigated, and two uses of the system are demonstrated. First,