Concept, construction and commissioning of an alignment system for deep X-ray lithography
An in-house-made alignment system for deep X-ray lithography is presented that features low costs, low weight and little demand in space. Synchrotron radiation illuminates alignment marks on mask and substrate. The radiation transmitted through these alignment marks is detected by X-ray-sensitive diodes. The mask is fixed to the vacuum chamber, whereas the substrate is mounted on a six-axis kinema